Miniature hexapod for high accuracy positioning
BORA is a miniature hexapod for the positioning and adjustment of precision elements with a resolution of 0.1 µm.
BORA is the most compact hexapod of SYMETRIE. It meets the most demanding criteria of the optics and nanotechnologies in terms of resolution, accuracy, stability and size. Its dimensions allows an integration in a small invironment, for instance at the tip of a goniometer for an application on synchrotron.
Specifications :
| Travel range |
± 20 mm / ± 15 °
|
| Repeatability |
± 1.5 µm / ± 6.5 µrad
|
| Resolution |
0.1 µm / 2 µrad
|
Applications :
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Instrumentation
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Optics
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Test laboratories
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Aeronautics and spatial
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Metrology
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Semiconductors