Hexapods

A wide range of the most advanced hexapods to
help you positioning a payload of a few grams
to several tons with the best guarantees
of stiffness and accuracy

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NANOPOS

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages, high quality joints and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

HV and UHV versions are available.

SPECIFICATIONS

Travel range: ± 5 mm / ± 10 °
Resolution: 10 nm / 1 µrad
Repeatability: ± 75 nm / ± 2 µrad
Payload: 500 g

APPLICATIONS

Instrumentation
Optics
Tests laboratories
Microscopy
Nanotechnologies
Semiconductors
Synchrotrons

DOWNLOAD

Fiche produit

Datasheet (PDF)

STEP

3D STEP (ZIP)

3D

3D view (PDF)

ELECTRONICS

Electronical rack
 Learn more about our powerful controller
Software
 Read more about our ergonomic software