Hexapods

A wide range of the most advanced hexapods to
help you positioning a payload of a few grams
to several tons with the best guarantees
of stiffness and accuracy

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JORAN

PRECISION POSITIONING HEXAPOD WITH HIGH STABILITY

JORAN hexapod is a high precision system designed to position and adjust elements with a 0.5 µrad angular resolution.

The conception of JORAN, particularly of its actuators, spherical joints and natural granite platforms, ensures great stability and guarantees the positioning quality over time.

Ceramic spherical joints can be replaced by universal joints if the angular travel range is too large or if external forces are too big.

Developed in collaboration with the European Synchrotron ESRF, it is ideal to support mirrors or vacuum chambers on synchrotrons beamlines.

Granite platforms can be replaced by steel platforms if preferred.

SPECIFICATIONS

Travel range: ± 65 mm / ± 3 °
Resolution: 0.1 µm / 0.5 µrad
Repeatability: ± 0.25 µm / ± 1 µrad
Payload: 1500 kg

APPLICATIONS

Optics
Synchrotrons: mirror or sample positioning
Space
EUV lithography

DOWNLOAD

Fiche produit

Datasheet (PDF)

STEP

3D STEP (ZIP)

3D

3D view (PDF)

ELECTRONICS

Electronical rack
 Learn more about our powerful controller
Software
 Read more about our ergonomic software

PUBLICATIONS

Poster ESRF SRI JORAN Hexapod (pdf)
TNO EBL2 EUV exposure facility (pdf)
Poster SOLEIL and SYMETRIE collaboration using Tango (pdf)
Paper SOLEIL and SYMETRIE collaboration using Tango (pdf)
Paper JORAN hexapod on ThomX project (pdf)